Micro and Nano Technologies and Systems

The group forms with the CeRMiN, the UCL Research center for micro- and nano-scopic materials and electronics devices a multidisciplinary team, involving both silicon device physicists, technologists and experimentalists, as well as circuit designers. It gathers about 50 members, out of which 5 professors and more than 36 Ph.D. students and researchers.

Principal Investigators : Denis Flandre, Laurent Francis, Isabelle Huynen, Sorin Melinte, Jean-Pierre Raskin

Research Labs : SOI Group, Sensors, Microsystems and Actuators Laboratory of Louvain (SMALL)

Nano    Nanoparticles   IEEE Sensors Journal

Nanoparticles for smart electronics

This activity covers the characterization up to 110 GHz, of bulk and nanocomposite materials in various states: solids, foams, liquids, powders, gels, films, … The models created using these measurements allow to extend the range of application of nanostructures, and to develop new sensors and signal processing devices. Of current interest are ferromagnetic nanowires for tunable electronics, carbonated nanoparticles (carbon nanotubes, graphene) for intelligent packaging (EMI shielding, ESD protection, photovoltaic), and nanoporous thin film membranes for fuel cell applications.

Molecular opto-electronics and plasmonics

Our current projects aim at understanding the fundamental nanoscience of man-made quantum structures, namely semiconductor nanodevices and hybrid inorganic-organic platforms for molecular opto-electronics and plasmonics. In particular, we use high-resolution nanolithography as well as soft-lithography and bottom-up fabrication techniques to engineer smart nano- and microsystems. Recently, our group started the development of cutting-edge instrumentation in the area of scanning tunneling spectroscopy and near-field experimental setups based on photon detection.

SOI CMOS technology

ICTEAM has been active in Silicon-on-Insulator (SOI) technology since 1986. Silicon-on-Insulator (SOI) has been a major theme of R&D for more than 20 years, leading to significant contributions with regards to e.g. double-gate MOSFETs, nanowires, high-temperature SOI CMOS, microwaves and millimeter-waves SOI MOSFETs and substrate, Ultra-Low-Power smart sensors (including biosensors) in terms of processing, characterization, simulation, modeling and design.


Bulk and surface micromachining sensors for chemical, medical and harsh environments applications. The group members are focused on varied devices design and fabrication of MEMS and NEMS structures co-integrated with SOI CMOS circuits: design and fabrication of NEMS-based lab-on-chip to characterize the electromechanical properties of materials at nanometer scale, nanowires gas sensors, nanoporous silicon membranes, magnetometers, flow, humidity, pressure and inertial sensors, surface acoustic wave device, etc.

Research infrastructure

Winfab is equipped with a complete pilot fabrication line on silicon/SOI substrates of about 1,000 m² for the rapid prototyping and validation of new fabrication steps and of new integrated devices or microsystems.

Electrical measurement set-ups available in Welcome cover a large range of frequencies (from DC up to 110 GHz) and temperatures (from few mK up to 400°C) on wafer-scale as well as packaged circuits levels. Physical (e.g. interface or thin layer properties) and mechanical (adhesion, stress...) characterization are widely available in the CeRMiN environment.

Simulation tools include industry-standard softwares for integrated processes and devices. Device irradiation is available at the nearby cyclotron research centre on a bench qualified by ESA. The wide research results have been honoured by more than 50 invited presentations in international and national conferences, as well as by several awards.

Most recent publications

Below are listed the 10 most recent journal articles and conference papers produced in this research area.
You also can access all publications by following this link : see all publications.


NANO journal

Journal Articles

1. Mesfin, Henok Mebratie; Hermans, Sophie; Huynen, Isabelle; Delcorte, Arnaud; Bailly, Christian. Thin oriented polymer carbon nanotube composites for microwave absorption. In: Materials Today : Proceedings,. (Accepté/Sous presse). http://hdl.handle.net/2078.1/166126

2. Al Kadi Jazairli, Mohamad; Flandre, Denis. A 65 nm CMOS Ultra-Low-Power Impulse Radio-Ultra-Wideband Emitter for Short-Range Indoor Localization. In: Journal of Low Power Electronics, Vol. 11, no.3, p. 349-358 (01/09/2015). doi:10.1166/jolpe.2015.1393. http://hdl.handle.net/2078.1/165608

3. Novo, Carla; Baptista, Joao; Guazzeli da Silveira, Marcilei; Giacomini, Renato; Afzalian, Aryan; Flandre, Denis. Study of Total Quantum Efficiency of Lateral SOI PIN Photodiodes with Back-Gate Bias, Intrinsic Length and Temperature Variation. In: ECS transactions, Vol. 66, no.5, p. 101-107 (2015). doi:10.1149/06605.0101ecst. http://hdl.handle.net/2078.1/165032

4. Tang, Xiaohui; Reckinger, Nicolas; Poncelet, Olivier; Louette, Pierre; Ureña Begara, Fernando; Idrissi, Hosni; Turner, Stuart; Cabosart, Damien; Colomer, Jean-François; Raskin, Jean-Pierre; Hackens, Benoît; Francis, Laurent. Damage evaluation in graphene underlying atomic layer deposition dielectrics. In: Scientific Reports, Vol. 5, no. 13523, p. 12 (2015). doi:10.1038/srep13523. http://hdl.handle.net/2078.1/164971

5. Couniot, Numa; de Streel, Guerric; Botman, François; Kuti Lusala, Angelo; Flandre, Denis; Bol, David. A 65 nm 0.5 V DPS CMOS Image Sensor With 17 pJ/Frame.Pixel and 42 dB Dynamic Range for Ultra-Low-Power SoCs. In: IEEE Journal of Solid State Circuits, Vol. 50, no. 10, p. 2419-2430 (10/2015). doi:10.1109/JSSC.2015.2457897. http://hdl.handle.net/2078.1/164957

6. El Hamid, Hamdy Abd; Iniguez, Benjamin; Kilchytska, Valeriya; Flandre, Denis; Ismail, Yehea. An analytical 3D model for short-channel effects in undoped FinFETs. In: Journal of Computational Electronics, Vol. 14, no.2, p. 500-505 (02/2015). doi:10.1007/s10825-015-0678-0. http://hdl.handle.net/2078.1/164954

7. Tran, M.-P.; Thomassin, J.-M.; Alexandre, M.; Jerome, C.; Huynen, Isabelle; Detrembleur, C. Nanocomposite foams of polypropylene and carbon nanotubes: Preparation, characterization, and evaluation of their performance as EMI absorbers. In: Macromolecular Chemistry and Physics, Vol. 216, no.12, p. 1302-1312 (2015). http://hdl.handle.net/2078.1/161633

8. Aqil, Abdelhafid; Vlad, Alexandru; Piedboeuf, Marie-Laure; Aqil, Mohamed; Job, Nathalie; Melinte, Sorin; Detrembleur, Christophe; Jérôme, Christine. A new design of organic radical batteries (ORBs): carbon nanotube buckypaper electrode functionalized by electrografting. In: Chemical Communications, Vol. 51, no.45, p. 9301-9304 (07/06/2015). doi:10.1039/c5cc02420j. http://hdl.handle.net/2078.1/159596

9. Gimenez, Salvador Pinillos; Galembeck, Egon Henrique Salerno; Renaux, Christian; Flandre, Denis. Diamond layout style impact on SOI MOSFET in high temperature environment. In: Microelectronics Reliability, Vol. MR_11492, p. 6 (13/03/2015). doi:10.1016/j.microrel.2015.02.015. http://hdl.handle.net/2078.1/157744

10. Poncelet, Olivier; Tallier, Guillaume; Simonis, Priscilla; Cornet, Alain; Francis, Laurent. Synthesis of bio-inspired multilayer polarizers and their application to anti-counterfeiting. In: Bioinspiration & Biomimetics : learning from nature, Vol. 10, no.2, p. 1-10 (26/02/2015). doi:10.1088/1748-3182/10/2/026004. http://hdl.handle.net/2078.1/157196

NANO conf

Conference Papers

1. Danlée, Yann; Jaiswar, Rajkumar Rampati; Mederos Henry, Francisco; Mesfin, Henok Mebratie; Bailly, Christian; Delcorte, Arnaud; Hermans, Sophie; Huynen, Isabelle. Nano4Waves: A metamaterial approach towards smart nanocomposites for nanosecond signal control. 15th International Conference on Nanotechnology (IEEE Nano 2015) (Rome,Italy, du 27/07/2015 au 30/07/2015). In: Proceedings of the IEEE Nanotechnology Conference (IEEE Nano 2015). p. 4 p. http://hdl.handle.net/2078.1/166125

2. Danlée, Yann; Delcorte, Arnaud; HERMANS, Sophie; Piraux, Luc; Bailly, Christian; Huynen, Isabelle. Broadband metamaterial absorbers from multilayered polymer-based nanocomposite films. 6th International Conference on Metamaterials, Photonic Crystals and Plasmonics (META'2015) (New York City, NY, USA, du 04/07/2015 au 07/03/2015). In: Proceedings of the 6th International Conference on Metamaterials, Photonic Crystals and Plasmonics. p. 1173-1174. http://hdl.handle.net/2078.1/166124

3. Mesfin, Henok Mebratie; Baudouin, Anne-Christine; Hermans, Sophie; Delcorte, Arnaud; Huynen, Isabelle; Bailly, Christian. Frequency selective microwave absorption induced by controlled orientation of graphene-like nanoplatelets in thin polymer films. Fourth International Conference on Multifunctional, Hybrid and Nanomaterials Conference (Sitges, Spain, du 09/03/2015 au 13/03/2015). http://hdl.handle.net/2078.1/166123

4. Bol, David; de Streel, Guerric; Flandre, Denis. Can We Connect Trillions of IoT Sensors in a Sustainable Way ? A Technology/Circuit Perspective. IEEE SOI-3D-Subthreshold Microelectronics Technology Unified Conference (S3S 2015) (Rohnert Park, California (USA), du 05/10/2015 au 08/10/2015). In: Proceedings of S3S 2015, IEEE, 2015, 978-1-5090-0259-7. http://hdl.handle.net/2078.1/165649

5. de Streel, Guerric; De Vos, Julien; Bol, David. A DeltaVT 0.2V to 1V 0.01mm2 9.7nW Voltage Reference in 65nm LP/GP CMOS. IEEE SOI-3D-Subthreshold Microelectronics Technology Unified Conference (S3S 2015) (Rohnert Park, California (USA), du 05/10/2015 au 08/10/2015). In: Proceedings of S3S 2015, IEEE, 2015, 978-1-5090-0259-7, 2. http://hdl.handle.net/2078.1/165644

6. de Streel, Guerric; Flandre, Denis; Dehollain, Catherine; Bol, David. Towards Ultra-Low-Voltage Wideband Noise-Cancelling LNAs in 28nm FDSOI. IEEE SOI-3D-Subthreshold Microelectronics Technology Unified Conference (S3S 2015) (Rohnert Park, California (USA), du 05/10/2015 au 08/10/2015). In: Proceedings of IEEE S3S, IEEE, 2015, 2. http://hdl.handle.net/2078.1/165643

7. El Fissi, Lamia; Jaouad, A.; Vandormael, Denis; Francis, Laurent. Fabrication of new Interdigital Transducers for Surface Acoustic Wave Device. 2015 International Congress on Ultrasonics (ICU 2015) (Metz (France), du 11/05/2015 au 14/05/2015). In: Physics Procedia (ScienceDirect), Elsevier B.V.: The Netherlands, 2015, p. 936-940. doi:10.1016/j.phpro.2015.08.194. http://hdl.handle.net/2078.1/165408

8. André, Nicolas; Li, Guoli; Gérard, Pierre; Poncelet, Olivier; Zeng, Y.; Ali, S.Z.; Udrea, F.; Francis, Laurent; Flandre, Denis. Wide Band Study of Silicon-on-Insulator Photodiodes on suspended Micro-hotplates Platforms. 2015 International Conference on IC Design and Technology (ICICDT 2015) (Leuven (Belgique), du 01/06/2015 au 03/06/2015). In: Proceedings of ICICDT 2015, IEEE, 2015, 1-4. doi:10.1109/ICICDT.2015.7165879. http://hdl.handle.net/2078.1/164958

9. Makovejev, Sergej; Planes, N.; Haond, M.; Flandre, Denis; Raskin, Jean-Pierre; Kilchytska, Valeriya. Self-Heating in 28 nm Bulk and FDSOI. 2015 Joint International EUROSOI Workshop and International Conference on Ultimate Integration on Silicon (EUROSOI-ULIS 2015) (Bologne (Italie), du 26/01/2015 au 28/01/2015). In: Proceedings of EUROSOI-ULIS 2015, IEEE, 2015, 978-1-4799-6910-4, 41-44. doi:10.1109/ULIS.2015.7063768. http://hdl.handle.net/2078.1/164955

10. Melinte, Sorin. Hybrid Materials for Li-ion Energy Storage Systems. 2015 International Conference on CMOS Emerging Technologies Research (CMOSETR 2015) (Vancouver (Canada), du 20/05/2015 au 22/05/2015). http://hdl.handle.net/2078.1/161241

More publications
| 19/12/2012 |