Micro and Nano Technologies and Systems

The group forms with the CeRMiN, the UCL Research center for micro- and nano-scopic materials and electronics devices a multidisciplinary team, involving both silicon device physicists, technologists and experimentalists, as well as circuit designers. It gathers about 50 members, out of which 5 professors and more than 36 Ph.D. students and researchers.

Principal Investigators : Denis Flandre, Laurent Francis, Isabelle Huynen, Sorin Melinte, Jean-Pierre Raskin

Research Labs : SOI Group, Sensors, Microsystems and Actuators Laboratory of Louvain (SMALL)

Nano    Nanoparticles   IEEE Sensors Journal

Nanoparticles for smart electronics

This activity covers the characterization up to 110 GHz, of bulk and nanocomposite materials in various states: solids, foams, liquids, powders, gels, films, … The models created using these measurements allow to extend the range of application of nanostructures, and to develop new sensors and signal processing devices. Of current interest are ferromagnetic nanowires for tunable electronics, carbonated nanoparticles (carbon nanotubes, graphene) for intelligent packaging (EMI shielding, ESD protection, photovoltaic), and nanoporous thin film membranes for fuel cell applications.

Molecular opto-electronics and plasmonics

Our current projects aim at understanding the fundamental nanoscience of man-made quantum structures, namely semiconductor nanodevices and hybrid inorganic-organic platforms for molecular opto-electronics and plasmonics. In particular, we use high-resolution nanolithography as well as soft-lithography and bottom-up fabrication techniques to engineer smart nano- and microsystems. Recently, our group started the development of cutting-edge instrumentation in the area of scanning tunneling spectroscopy and near-field experimental setups based on photon detection.

SOI CMOS technology

ICTEAM has been active in Silicon-on-Insulator (SOI) technology since 1986. Silicon-on-Insulator (SOI) has been a major theme of R&D for more than 20 years, leading to significant contributions with regards to e.g. double-gate MOSFETs, nanowires, high-temperature SOI CMOS, microwaves and millimeter-waves SOI MOSFETs and substrate, Ultra-Low-Power smart sensors (including biosensors) in terms of processing, characterization, simulation, modeling and design.


Bulk and surface micromachining sensors for chemical, medical and harsh environments applications. The group members are focused on varied devices design and fabrication of MEMS and NEMS structures co-integrated with SOI CMOS circuits: design and fabrication of NEMS-based lab-on-chip to characterize the electromechanical properties of materials at nanometer scale, nanowires gas sensors, nanoporous silicon membranes, magnetometers, flow, humidity, pressure and inertial sensors, surface acoustic wave device, etc.

Research infrastructure

Winfab is equipped with a complete pilot fabrication line on silicon/SOI substrates of about 1,000 m² for the rapid prototyping and validation of new fabrication steps and of new integrated devices or microsystems.

Electrical measurement set-ups available in Welcome cover a large range of frequencies (from DC up to 110 GHz) and temperatures (from few mK up to 400°C) on wafer-scale as well as packaged circuits levels. Physical (e.g. interface or thin layer properties) and mechanical (adhesion, stress...) characterization are widely available in the CeRMiN environment.

Simulation tools include industry-standard softwares for integrated processes and devices. Device irradiation is available at the nearby cyclotron research centre on a bench qualified by ESA. The wide research results have been honoured by more than 50 invited presentations in international and national conferences, as well as by several awards.

Most recent publications

Below are listed the 10 most recent journal articles and conference papers produced in this research area.
You also can access all publications by following this link : see all publications.


NANO journal

Journal Articles

1. Emplit, Aline; Lian, Jian Xiang; Huynen, Isabelle; Vlad, Alexandru; sarrazin, Michael. Colloidal pattern replication through contact photolithography operated in a 'Talbot–Fabry–Perot' regime. In: Nanotechnology, Vol. 25, no.14, p. 145303 (2014). doi:10.1088/0957-4484/25/14/145303. http://hdl.handle.net/2078.1/142482

2. Monnereau, Laure; Urbanczyk, Laetitia; Thomassin, Jean-Michel; ALEXANDRE, Michael; Jérome, Christine; Huynen, Isabelle; Bailly, Christian; Detrembleur, Christophe. Supercritical CO2 and polycarbonate based nanocomposites: a critical issue for foaming. In: Polymer, (2014). doi:10.1016/j.polymer.2014.03.035 (Accepté/Sous presse). http://hdl.handle.net/2078.1/142481

3. Vlad, Alexandru; Singh, N.; Rolland, Julien; Melinte, Sorin; Ajayan, P.M.; Gohy, Jean-François. Hybrid supercapacitor-battery materials for fast electrochemical charge storage. In: Scientific Reports, Vol. 4, p. 4315 (07/03/2014). doi:10.1038/srep04315. http://hdl.handle.net/2078.1/141227

4. Tang, Xiaohui; Francis, Laurent; Dutu, Constantin Augustin; Reckinger, Nicolas; Raskin, Jean-Pierre. Self-formation of sub-10 nm nanogaps based on silicidation. In: Nanotechnology, Vol. 25, no.115201, p. 115201-1/9 (24/02/2014). doi:10.1088/0957-4484/25/11/115201. http://hdl.handle.net/2078.1/140305

5. Bernal, Mar; Martin-Gallego, M; Molenberg, Isabel; Huynen, Isabelle; Lopez-Manchado, M; Verdejo, R. Influence of carbon nanoparticles on the polymerization and EMI shielding properties of PU nanocomposite foams. In: RSC Advances, Vol. 16, no.4, p. 7911-7918 (2014). doi:10.1039/C3RA45607B. http://hdl.handle.net/2078.1/138955

6. Dutu, Constantin Augustin; Vlad, Alexandru; Reckinger, Nicolas; Flandre, Denis; Raskin, Jean-Pierre; Melinte, Sorin. Tuning the surface conditioning of trapezoidally shaped silicon nanowires by (3-aminopropyl)triethoxysilane. In: Applied Physics Letters, Vol. 104, no. 2, p. 023502 (4). doi:10.1063/1.4861598. http://hdl.handle.net/2078.1/138025

7. Oueriemi, Ibtissem; Raskin, Jean-Pierre; Roda Neve, Cesar; Choubani, Fethi; Dupont, Vedi; Lardot, Véronique; Huynen, Isabelle. Analysis of Slow-wave Propagation in Coplanar Transmission Lines with Inkjet Printed multi-walled carbon nanotubes network. In: Microwave & Optical Technology Letters, Vol. 56, no. 5, p. 1118-1124 (2014). doi:10.1002/mop. http://hdl.handle.net/2078.1/136910

8. Molenberg, Isabel; Bernal, Mar; Bollen, Pierre; Spote, David; Verdejo, Raquel; Pardoen, Thomas; Bailly, Christian; Huynen, Isabelle. Simple, convenient and non-destructive electromagnetic characterisation technique for composite and multiscale hybrid samples at microwave frequencies. In: Microwave & Optical Technology Letters, Vol. 56, no. 2, p. 504-509 (February 2014). doi:10.1002/mop. http://hdl.handle.net/2078.1/134366

9. Ouhib, Farid; Desbief, Simon; Lazzaroni, Roberto; Melinte, Sorin; Dutu, Constantin Augustin; Jérôme, Christine; Detrembleur, Christophe. Electrografting onto ITO substrates of poly(thiophene)-based micelles decorated by acrylate groups.. In: Polymer Chemistry, Vol. 4, no. 15, p. 4151-4161 (2103). doi:10.1039/C3PY00511A. http://hdl.handle.net/2078.1/131521

10. Reckinger, Nicolas; Vlad, Alexandru; Melinte, Sorin; Colomer, Jean-François; Sarrazin, Michaël. Graphene-coated holey metal films: Tunable molecular sensing by surface plasmon resonance. In: Applied Physics Letters, Vol. 102, no. 21, p. 211108(4) (30/05/2013). doi:10.1063/1.4808095. http://hdl.handle.net/2078.1/130356

NANO conf

Conference Papers

1. Vlad, Alexandru; Melinte, Sorin; Huynen, Isabelle. Direct Transcription of Two-Dimensional Colloidal Crystal Arrays into Large-Area Three-Dimensional Silicon Photonic Crystals. Material Research Society (MRS) - Fall Meeting 2013 (Boston (USA), du 01/12/2013 au 06/12/2013). http://hdl.handle.net/2078.1/138607

2. Vlad, Alexandru; Singh, Neelam; Rolland, Julien; Melinte, Sorin; Ajayan, Pulickel; Gohy, Jean-François. Superior Performance Hybridized Supercapacitor / Lithium-Ion Battery Redox Electrodes. Material Research Society (MRS) - Fall Meeting 2013 (Boston (USA), du 01/12/2013 au 06/12/2013). http://hdl.handle.net/2078.1/138606

3. Vlad, Alexandru; Sandu, Georgiana; Brassart, Laurence; Singh, Neelam; Gohy, Jean-François; Ajayan, Pulickel; Melinte, Sorin. Metal Coated Silicon Nanowire Anodes for Lithium Batteries: Enhanced Cycling Stability, Suppressed Anisotropic Swelling and Controlled Fracture Modes. Material Research Society (MRS) - Fall Meeting 2013 (Boston (USA), du 01/12/2013 au 06/12/2013). http://hdl.handle.net/2078.1/138604

4. Tang, Xiaohui; Francis, Laurent; Dutu, Constantin Augustin; Reckinger, Nicolas; Raskin, Jean-Pierre. Sub-10-nm Nanogap Fabrication by Silicidation. 13th IEEE International Conference on Nanotechnology 2013 (Beijing (China), du 05/08/2013 au 08/08/2013). In: Proceedings of the 13th IEEE International Conference on Nanotechnology 2013, IEEE, 2013, p. 570-573. http://hdl.handle.net/2078.1/133894

5. Afzalian, Aryan; Flandre, Denis. NEGF Computational study if Advanced Nanoscale FET Biosensors for Single DNA Molecule Detection. 2013 Silicon Nanoelectronics Workshop (Kyoto (Japan), du 09/06/2013 au 10/06/2013). In: Proceedings of the 2013 Silicon Nanoelectronics Workshop, 2013, 2. http://hdl.handle.net/2078.1/131312

6. Afzalian, Aryan; Lherbier, Aurélien; Charlier, Jean-Christophe; Flandre, Denis. Multiscale Simulation of Epoxide Adsorbate Functionalization on Graphene Nanoribbons. 16th International Workshop on Computational Electronics (Nara (Japan), du 04/06/2013 au 07/06/2013). In: Proceedings of the 16th International Workshop on Computational Electronics, 2013, 978-3-901578-26-7, p. 40-41. http://hdl.handle.net/2078.1/131176

7. Melinte, Sorin; Iordanescu, Andra-Gabriela; Dutu, Constantin Augustin; Flandre, Denis; Faniel, Sébastien; Rodrigues Martins, Frederico; Hackens, Benoît. Fabrication, electrical characterization and scanning gate microscopy of Schottky silicon nanowire devices.. APS March Meeting (Baltimore (USA), du 18/03/2013 au 22/03/2013). In: Bulletin of the American Physical Society, 2013. http://hdl.handle.net/2078.1/128610

8. Fino, Leonardo; Renaux, Christian; Gimenez, Salvador; Flandre, Denis. Using OCTO SOI nMOSFET to Reduce Die Area of Analog Integrated Circuits. VII Workshop on Semiconductor and Micro & Nano Technology, SEMINATEC 2012 (Sao Bernardo do Campo (Brazil), du 12/04/2012 au 13/04/2012). In: Proceedings of the VII Workshop on Semiconductor and Micro & Nano Technology, SEMINATEC 2012, 2012. http://hdl.handle.net/2078.1/129579

9. Rudenko, Tamara; Nazarov, Alexei; Kilchytska, Valeriya; Flandre, Denis. Revision of interface coupling in ultra-thin body SOI MOSFETs. International Conference "Micro- and Nanoelectronics-2012" (ICMNE-2012) (Moscow-Zvenigorod (Russia), du 01/10/2012 au 05/10/2012). In: Book of Abstracts of the International Conference "Micro- and Nanoelectronics-2012" (ICMNE-2012), 2012, 1. http://hdl.handle.net/2078.1/123969

10. Rudenko, Tamara; Nazarov, Alexei; Kilchytska, Valeriya; Flandre, Denis. Threshold voltage of advanced MOSFETs: Physical criteria and experimental extraction methods. International Conference "Micro- and Nanoelectronics-2012" (ICMNE-2012) (Moscow-Zvenigorod (Russia), du 01/10/2012 au 05/10/2012). In: Book of Abstracts of the International Conference "Micro- and Nanoelectronics-2012" (ICMNE-2012), 2012, 1. http://hdl.handle.net/2078.1/123964

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