Micro and Nano Technologies and Systems

The group forms with the CeRMiN, the UCL Research center for micro- and nano-scopic materials and electronics devices a multidisciplinary team, involving both silicon device physicists, technologists and experimentalists, as well as circuit designers. It gathers about 50 members, out of which 5 professors and more than 36 Ph.D. students and researchers.

Principal Investigators : Denis Flandre, Laurent Francis, Isabelle Huynen, Sorin Melinte, Jean-Pierre Raskin

Research Labs : SOI Group, Sensors, Microsystems and Actuators Laboratory of Louvain (SMALL)

Nano    Nanoparticles   IEEE Sensors Journal

Nanoparticles for smart electronics

This activity covers the characterization up to 110 GHz, of bulk and nanocomposite materials in various states: solids, foams, liquids, powders, gels, films, … The models created using these measurements allow to extend the range of application of nanostructures, and to develop new sensors and signal processing devices. Of current interest are ferromagnetic nanowires for tunable electronics, carbonated nanoparticles (carbon nanotubes, graphene) for intelligent packaging (EMI shielding, ESD protection, photovoltaic), and nanoporous thin film membranes for fuel cell applications.

Molecular opto-electronics and plasmonics

Our current projects aim at understanding the fundamental nanoscience of man-made quantum structures, namely semiconductor nanodevices and hybrid inorganic-organic platforms for molecular opto-electronics and plasmonics. In particular, we use high-resolution nanolithography as well as soft-lithography and bottom-up fabrication techniques to engineer smart nano- and microsystems. Recently, our group started the development of cutting-edge instrumentation in the area of scanning tunneling spectroscopy and near-field experimental setups based on photon detection.

SOI CMOS technology

ICTEAM has been active in Silicon-on-Insulator (SOI) technology since 1986. Silicon-on-Insulator (SOI) has been a major theme of R&D for more than 20 years, leading to significant contributions with regards to e.g. double-gate MOSFETs, nanowires, high-temperature SOI CMOS, microwaves and millimeter-waves SOI MOSFETs and substrate, Ultra-Low-Power smart sensors (including biosensors) in terms of processing, characterization, simulation, modeling and design.


Bulk and surface micromachining sensors for chemical, medical and harsh environments applications. The group members are focused on varied devices design and fabrication of MEMS and NEMS structures co-integrated with SOI CMOS circuits: design and fabrication of NEMS-based lab-on-chip to characterize the electromechanical properties of materials at nanometer scale, nanowires gas sensors, nanoporous silicon membranes, magnetometers, flow, humidity, pressure and inertial sensors, surface acoustic wave device, etc.

Research infrastructure

Winfab is equipped with a complete pilot fabrication line on silicon/SOI substrates of about 1,000 m² for the rapid prototyping and validation of new fabrication steps and of new integrated devices or microsystems.

Electrical measurement set-ups available in Welcome cover a large range of frequencies (from DC up to 110 GHz) and temperatures (from few mK up to 400°C) on wafer-scale as well as packaged circuits levels. Physical (e.g. interface or thin layer properties) and mechanical (adhesion, stress...) characterization are widely available in the CeRMiN environment.

Simulation tools include industry-standard softwares for integrated processes and devices. Device irradiation is available at the nearby cyclotron research centre on a bench qualified by ESA. The wide research results have been honoured by more than 50 invited presentations in international and national conferences, as well as by several awards.

Most recent publications

Below are listed the 10 most recent journal articles and conference papers produced in this research area.
You also can access all publications by following this link : see all publications.


NANO journal

Journal Articles

1. Kotipalli, Raja Venkata Ratan; Descamps, P.; Delamare, Romain; Kaiser, V.; Beaucarne, G.; Flandre, Denis. Electronic properties of negatively charged SiOx films deposited by Atmospheric Pressure Plasma Liquid Deposition for surface passivation of p-type c-Si solar cells. In: Thin Solid Films, Vol. 611, p. 74-77 (12/05/2016). doi:10.1016/j.tsf.2016.05.016. http://hdl.handle.net/2078.1/174799

2. Francis, Laurent. Combined surface acoustic wave and surface plasmon measurement of collagen and fibrinogen layer physical properties. In: Sensing and Bio-Sensing Research, , p. 11 (2016). doi:10.1016/j.sbsr.2016.05.007 (Accepté/Sous presse). http://hdl.handle.net/2078.1/174584

3. Dutu, Constantin Augustin; Vlad, Alexandru; Roda Neve, Cesar; Avram, Ionel; Sandu, Georgiana; Raskin, Jean-Pierre; Melinte, Sorin. Surveying colloid sedimentation by coplanar waveguides. In: Nanotechnology, Vol. 27, no.225502, p. 6 (2016). doi:10.1088/0957-4484/27/22/225502. http://hdl.handle.net/2078.1/173668

4. Couniot, Numa; Afzalian, Aryan; Van Overstraeten, Nancy; Francis, Laurent; Flandre, Denis. Capacitive biosensing of bacterial cells: sensitivity optimization. In: IEEE Sensors Journal, Vol. 16, no. 3, p. 11 pages (03/02/2016). doi:10.1109/JSEN.2015.2485120. http://hdl.handle.net/2078.1/170199

5. El Hajjam, K.G.; Bounouar, M.A.; Baboux, N.; Ecoffey, Serge; Guilmain, M.; Puyoo, E.; Francis, Laurent; Souifi, A.; Drouin, D.; Calmon, F. Tunnel junction engineering for optimized metallic single-electron transistor. In: IEEE Transactions on Electron Devices, Vol. 62, no.9, p. 2998-3003 (01/09/2015). doi:10.1109/TED.2015.2452575. http://hdl.handle.net/2078.1/171473

6. El Fissi, Lamia; Xhurdebise, Victor; Francis, Laurent. Effects of laser operating parameters on piezoelectric substrates micromachining with picosecond laser. In: Micromachines, Vol. 6, no.1, p. 19-31 (2015). doi:10.3390/mi6010019. http://hdl.handle.net/2078.1/171470

7. de Souza, Michelly; Flandre, Denis; Trevisoli Doria, Rodrigo; Trevisoli, Renan; Pavanello, Marcelo Antonio. On the improvement of DC analog characteristics of FD SOI transistors by using asymmetric self-cascode configuration. In: Solid-State Electronics, Vol. 117, p. 152-160 (2/12/2015). doi:10.1016/j.sse.2015.11.018. http://hdl.handle.net/2078.1/169679

8. Rudenko, Tamara; Nazarov, Alexei; Kilchytska, Valeriya; Flandre, Denis. A review of special gate coupling effects in long-channel SOI MOSFETs with lightly doped ultra-thin bodies and their compact analytical modeling. In: Solid-State Electronics, Vol. 117, p. 66-76 (28/11/2015). doi:10.1016/j.sse.2015.11.017. http://hdl.handle.net/2078.1/169672

9. Kazemi Esfeh, Babak; Kilchytska, Valeriya; Barral, V.; Planes, N.; Haond, M.; Flandre, Denis; Raskin, Jean-Pierre. Assessment of 28nm UTBB FD-SOI technology platform for RF applications: Figures of merit and effect of parasitic elements. In: Solid-State Electronics, Vol. 117, p. 130-137 (11/12/2015). doi:10.1016/j.sse.2015.11.020. http://hdl.handle.net/2078.1/169663

10. Al Kadi Jazairli, Mohamad; Flandre, Denis. A 65 nm CMOS Ultra-Low-Power Impulse Radio-Ultra-Wideband Emitter for Short-Range Indoor Localization. In: Journal of Low Power Electronics, Vol. 11, no.3, p. 349-358 (01/09/2015). doi:10.1166/jolpe.2015.1393. http://hdl.handle.net/2078.1/165608

NANO conf

Conference Papers

1. Dorai, R.T.; Flandre, Denis; Trevisoli, R.; de Souza, Michelly; Pavanelo, Marcelo Antonio. Use of back gate bias to enhance the analog performance of planar FD and UTBB SOI transistors-based self-cascode structures. 2015 30th Symposium on Microelectronics Technology and Devices (SBMicro) (Salvador, du 31/08/2015 au 04/09/2015). In: Proceedings of SBMicro 2015, 2015, 978-1-4673-7162-9. http://hdl.handle.net/2078.1/171039

2. d'Oliveira, L.M.; Doria, R.T.; Pavanelo, Marcelo Antonio; Flandre, Denis; de Souza, Michelly. Effect of channel doping concentration on the harmonic distortion of asymmetric n- and p-type self-cascode MOSFETs. 2015 30th Symposium on Microelectronics Technology and Devices (SBMicro 2015) (Salvador, du 31/08/2015 au 04/09/2015). In: Proceedings of SBMicro 2015, 2015, 978-1-4673-7162-9. http://hdl.handle.net/2078.1/171037

3. Assalti, R.; Pavanello, Marcelo Antonio; Flandre, Denis; de Souza, Michelly. Asymmetric Self-Cascode versus Graded-Channel SOI nMOSFETs for analog applications. 2015 30th Symposium on Microelectronics Technology and Devices (SBMicro 2015) (Salvador, du 31/08/2015 au 04/09/2015). In: Proceedings of SBMicro 2015, 2015, 978-1-4673-7162-9. http://hdl.handle.net/2078.1/170457

4. Vlad, Alexandru; Singh, Neelam; Melinte, Sorin; Gohy, Jean-François; Ajayan, Pulickel. Carbon Redox-Polymer-Gel Hybrid Supercapacitors. 2015 MRS Fall Meeting & Exhibit (Boston (USA), du 29/11/2015 au 04/12/2015). In: Proceedings of the 2015 MRS Fall Meeting & Exhibit, 2015, p. 1. http://hdl.handle.net/2078.1/170297

5. Kassa, Hailu Gebru; Ye, Ran; Sandu, Georgiana; Melinte, Sorin; Leclere, Philippe. Hybrid Organic/Inorganic Nanostructures for Energy Conversion and Storage Devices on Flexible Substrates. 2015 MRS Fall Meeting & Exhibit (Boston (USA), du 29/11/2015 au 04/12/2015). In: Proceedings of the 2015 MRS Fall Meeting & Exhibit, 2015, p. 1. http://hdl.handle.net/2078.1/170280

6. Fino, Leonardo Navarenho de Souza; da Silveira, M.A.G.; Renaux, Christian; Flandre, Denis; Gimenez, Salvador Pinillos. OCTO Layout Variations as an Alternative to Mitigate TID Effects. 10th Workshop on Semiconductors and Micro & Nano Technology (SEMINATEC 2015) (Sao Bernardo do Campo (Brazil), du 09/04/2015 au 10/04/2015). http://hdl.handle.net/2078.1/167803

7. Danlée, Yann; Jaiswar, Rajkumar Rampati; Mederos Henry, Francisco; Mesfin, Henok Mebratie; Bailly, Christian; Delcorte, Arnaud; Hermans, Sophie; Huynen, Isabelle. Nano4Waves: A metamaterial approach towards smart nanocomposites for nanosecond signal control. 15th International Conference on Nanotechnology (IEEE Nano 2015) (Rome,Italy, du 27/07/2015 au 30/07/2015). In: Proceedings of the IEEE Nanotechnology Conference (IEEE Nano 2015). p. 4 p. http://hdl.handle.net/2078.1/166125

8. Danlée, Yann; Delcorte, Arnaud; HERMANS, Sophie; Piraux, Luc; Bailly, Christian; Huynen, Isabelle. Broadband metamaterial absorbers from multilayered polymer-based nanocomposite films. 6th International Conference on Metamaterials, Photonic Crystals and Plasmonics (META'2015) (New York City, NY, USA, du 04/07/2015 au 07/03/2015). In: Proceedings of the 6th International Conference on Metamaterials, Photonic Crystals and Plasmonics. p. 1173-1174. http://hdl.handle.net/2078.1/166124

9. Mesfin, Henok Mebratie; Baudouin, Anne-Christine; Hermans, Sophie; Delcorte, Arnaud; Huynen, Isabelle; Bailly, Christian. Frequency selective microwave absorption induced by controlled orientation of graphene-like nanoplatelets in thin polymer films. Fourth International Conference on Multifunctional, Hybrid and Nanomaterials Conference (Sitges, Spain, du 09/03/2015 au 13/03/2015). http://hdl.handle.net/2078.1/166123

10. El Fissi, Lamia; Jaouad, A.; Vandormael, Denis; Francis, Laurent. Fabrication of new Interdigital Transducers for Surface Acoustic Wave Device. 2015 International Congress on Ultrasonics (ICU 2015) (Metz (France), du 11/05/2015 au 14/05/2015). In: Physics Procedia (ScienceDirect), Elsevier B.V.: The Netherlands, 2015, p. 936-940. doi:10.1016/j.phpro.2015.08.194. http://hdl.handle.net/2078.1/165408

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